VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Carbon (amorphous): C (1s), BE Cu (2p3)= 932.63 eV
1
Ion gun AOI was ca. 70 deg
NORM
REGULAR
1
0
0
0
0
0
1
Ion gun AOI was ca. 70 deg
Carbon (amorphous): C (1s), BE Cu (2p3)= 932.63 eV
2003
4
25
22
14
12
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.34
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
305
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
40
4.00E-06
0
0
0
0
1202
35
3318
0.406289
0.411415
421
0.411415
388
0.411406
340
0.411397
345
0.411389
360
0.41138
351
0.411371
315
0.411362
348
0.411354
390
0.411345
322
0.411336
309
0.411328
371
0.411319
337
0.41131
363
0.411302
301
0.411293
331
0.411284
334
0.411275
329
0.411267
353
0.411258
329
0.411249
334
0.411241
341
0.411232
343
0.411223
343
0.411215
330
0.411206
347
0.411197
321
0.411189
354
0.41118
313
0.411171
351
0.411162
338
0.411154
318
0.411145
309
0.411136
334
0.411128
345
0.411119
325
0.41111
317
0.411102
327
0.411093
316
0.411084
312
0.411076
332
0.411067
354
0.411058
328
0.41105
357
0.411041
300
0.411032
311
0.411024
324
0.411015
303
0.411006
305
0.410997
303
0.410989
314
0.41098
305
0.410971
322
0.410963
281
0.410954
296
0.410945
286
0.410937
306
0.410928
309
0.410919
313
0.410911
286
0.410902
333
0.410893
284
0.410885
312
0.410876
305
0.410867
304
0.410859
300
0.41085
308
0.410841
305
0.410833
297
0.410824
308
0.410815
285
0.410807
290
0.410798
320
0.410789
301
0.410781
294
0.410772
279
0.410763
272
0.410755
286
0.410746
278
0.410737
269
0.410729
292
0.41072
272
0.410711
298
0.410703
282
0.410694
281
0.410685
293
0.410677
293
0.410668
282
0.410659
291
0.410651
262
0.410642
301
0.410633
263
0.410625
262
0.410616
292
0.410608
263
0.410599
268
0.41059
254
0.410582
311
0.410573
264
0.410564
284
0.410556
266
0.410547
279
0.410538
275
0.41053
290
0.410521
252
0.410512
273
0.410504
267
0.410495
301
0.410486
242
0.410478
278
0.410469
260
0.41046
274
0.410452
261
0.410443
269
0.410435
260
0.410426
274
0.410417
286
0.410409
253
0.4104
275
0.410391
259
0.410383
254
0.410374
277
0.410365
238
0.410357
276
0.410348
276
0.41034
266
0.410331
276
0.410322
273
0.410314
246
0.410305
271
0.410296
263
0.410288
287
0.410279
302
0.41027
261
0.410262
267
0.410253
252
0.410245
244
0.410236
244
0.410227
256
0.410219
287
0.41021
263
0.410201
252
0.410193
266
0.410184
274
0.410176
234
0.410167
258
0.410158
257
0.41015
238
0.410141
250
0.410132
211
0.410124
239
0.410115
237
0.410107
264
0.410098
249
0.410089
261
0.410081
254
0.410072
263
0.410063
217
0.410055
259
0.410046
260
0.410038
269
0.410029
245
0.41002
245
0.410012
246
0.410003
236
0.409994
257
0.409986
251
0.409977
219
0.409969
209
0.40996
256
0.409951
263
0.409943
235
0.409934
239
0.409926
244
0.409917
254
0.409908
229
0.4099
228
0.409891
235
0.409883
251
0.409874
252
0.409865
253
0.409857
268
0.409848
243
0.40984
278
0.409831
287
0.409822
240
0.409814
243
0.409805
250
0.409796
237
0.409788
250
0.409779
274
0.409771
275
0.409762
243
0.409753
261
0.409745
236
0.409736
221
0.409728
267
0.409719
245
0.40971
229
0.409702
254
0.409693
251
0.409685
260
0.409676
264
0.409668
268
0.409659
264
0.40965
241
0.409642
284
0.409633
245
0.409625
255
0.409616
257
0.409607
278
0.409599
270
0.40959
272
0.409582
245
0.409573
249
0.409564
279
0.409556
266
0.409547
258
0.409539
279
0.40953
246
0.409521
281
0.409513
252
0.409504
230
0.409496
245
0.409487
295
0.409479
263
0.40947
251
0.409461
282
0.409453
292
0.409444
254
0.409436
255
0.409427
274
0.409419
264
0.40941
248
0.409401
272
0.409393
284
0.409384
288
0.409376
254
0.409367
252
0.409358
243
0.40935
247
0.409341
265
0.409333
263
0.409324
252
0.409316
266
0.409307
267
0.409298
259
0.40929
297
0.409281
287
0.409273
253
0.409264
263
0.409256
259
0.409247
292
0.409238
303
0.40923
284
0.409221
300
0.409213
277
0.409204
247
0.409196
300
0.409187
273
0.409179
260
0.40917
272
0.409161
271
0.409153
323
0.409144
246
0.409136
285
0.409127
285
0.409119
267
0.40911
281
0.409101
274
0.409093
303
0.409084
285
0.409076
292
0.409067
271
0.409059
294
0.40905
302
0.409042
286
0.409033
330
0.409024
332
0.409016
305
0.409007
294
0.408999
288
0.40899
289
0.408982
266
0.408973
292
0.408965
307
0.408956
296
0.408948
308
0.408939
319
0.40893
317
0.408922
275
0.408913
289
0.408905
306
0.408896
296
0.408888
316
0.408879
325
0.408871
288
0.408862
319
0.408854
353
0.408845
317
0.408836
315
0.408828
350
0.408819
321
0.408811
318
0.408802
320
0.408794
338
0.408785
339
0.408777
326
0.408768
294
0.40876
362
0.408751
310
0.408742
323
0.408734
345
0.408725
331
0.408717
347
0.408708
353
0.4087
367
0.408691
323
0.408683
326
0.408674
321
0.408666
325
0.408657
322
0.408649
351
0.40864
346
0.408632
331
0.408623
372
0.408615
335
0.408606
366
0.408597
353
0.408589
325
0.40858
369
0.408572
351
0.408563
355
0.408555
331
0.408546
345
0.408538
331
0.408529
354
0.408521
347
0.408512
370
0.408504
398
0.408495
364
0.408487
400
0.408478
383
0.40847
316
0.408461
394
0.408453
361
0.408444
394
0.408436
377
0.408427
373
0.408419
406
0.40841
370
0.408401
428
0.408393
359
0.408384
398
0.408376
373
0.408367
405
0.408359
376
0.40835
426
0.408342
383
0.408333
397
0.408325
459
0.408316
423
0.408308
449
0.408299
511
0.408291
448
0.408282
462
0.408274
476
0.408265
491
0.408257
488
0.408248
502
0.40824
548
0.408231
484
0.408223
565
0.408214
552
0.408206
581
0.408197
611
0.408189
623
0.40818
654
0.408172
686
0.408163
700
0.408155
712
0.408146
801
0.408138
868
0.408129
925
0.408121
903
0.408112
1080
0.408104
1037
0.408095
1236
0.408087
1285
0.408078
1411
0.40807
1508
0.408061
1482
0.408053
1624
0.408044
1645
0.408036
1780
0.408027
1858
0.408019
1909
0.40801
2086
0.408002
2119
0.407993
2181
0.407985
2262
0.407976
2247
0.407968
2404
0.407959
2471
0.407951
2560
0.407942
2613
0.407934
2644
0.407925
2836
0.407917
2869
0.407909
2953
0.4079
2982
0.407892
3220
0.407883
3218
0.407875
3318
0.407866
3271
0.407858
3182
0.407849
3146
0.407841
2956
0.407832
2888
0.407824
2696
0.407815
2477
0.407807
2304
0.407798
2260
0.40779
2071
0.407781
1779
0.407773
1575
0.407764
1401
0.407756
1216
0.407747
1082
0.407739
927
0.40773
784
0.407722
703
0.407714
581
0.407705
520
0.407697
386
0.407688
393
0.40768
272
0.407671
275
0.407663
246
0.407654
200
0.407646
193
0.407637
144
0.407629
168
0.40762
138
0.407612
132
0.407603
117
0.407595
114
0.407586
110
0.407578
96
0.40757
99
0.407561
119
0.407553
80
0.407544
96
0.407536
93
0.407527
77
0.407519
81
0.40751
79
0.407502
86
0.407493
89
0.407485
81
0.407477
78
0.407468
73
0.40746
85
0.407451
90
0.407443
68
0.407434
88
0.407426
69
0.407417
74
0.407409
87
0.4074
76
0.407392
64
0.407384
60
0.407375
66
0.407367
84
0.407358
70
0.40735
74
0.407341
57
0.407333
61
0.407324
67
0.407316
61
0.407307
70
0.407299
69
0.407291
64
0.407282
57
0.407274
72
0.407265
52
0.407257
67
0.407248
66
0.40724
67
0.407231
61
0.407223
58
0.407215
70
0.407206
63
0.407198
60
0.407189
48
0.407181
66
0.407172
56
0.407164
66
0.407156
48
0.407147
58
0.407139
60
0.40713
50
0.407122
63
0.407113
64
0.407105
55
0.407096
56
0.407088
72
0.40708
66
0.407071
55
0.407063
54
0.407054
62
0.407046
62
0.407037
56
0.407029
55
0.407021
58
0.407012
48
0.407004
66
0.406995
57
0.406987
47
0.406978
62
0.40697
60
0.406962
59
0.406953
50
0.406945
51
0.406936
55
0.406928
55
0.406919
57
0.406911
65
0.406903
60
0.406894
57
0.406886
72
0.406877
59
0.406869
45
0.406861
64
0.406852
41
0.406844
51
0.406835
65
0.406827
64
0.406818
65
0.40681
71
0.406802
50
0.406793
72
0.406785
58
0.406776
65
0.406768
53
0.40676
57
0.406751
52
0.406743
63
0.406734
79
0.406726
61
0.406718
65
0.406709
57
0.406701
46
0.406692
64
0.406684
57
0.406675
61
0.406667
43
0.406659
58
0.40665
35
0.406642
58
0.406633
51
0.406625
59
0.406617
63
0.406608
70
0.4066
44
0.406591
55
0.406583
62
0.406575
57
0.406566
51
0.406558
59
0.406549
68
0.406541
44
0.406533
45
0.406524
58
0.406516
68
0.406507
55
0.406499
51
0.406491
43
0.406482
56
0.406474
50
0.406465
52
0.406457
63
0.406449
45
0.40644
52
0.406432
37
0.406423
64
0.406415
48
0.406407
64
0.406398
48
0.40639
66
0.406382
54
0.406373
63
0.406365
58
0.406356
61
0.406348
62
0.40634
53
0.406331
71
0.406323
64
0.406314
58
0.406306
67
0.406298
66
0.406289
end of experiment
